Description
project | Specification |
Power specifications | DC24V±10% |
Range | ±1000um |
Resolution | 0.1um |
Full scale linearity error | ≤0.1% |
Repeatability error | ≤1um |
Operating temperature range | -10℃~50℃ |
Data collection method | Parallel port communication |
Nonlinear | 0.001%F.S |
Time Drift | 0.005% F.S |
Input sensitivity | 0.004uV/d |
Comprehensive accuracy | 0.1% |
